Foto: JGU
The TESCAN Clara scanning electron microscope (SEM) is operated with a FEG, equipped with 2 energy dispersive X-ray spectrometer (EDS) and an electron back scattered diffraction (EBSD) detector to generate diffraction patterns for phase analysis. It is speciallized for Cryo applications.
| Acceleration voltage | 5 - 30 keV |
|---|---|
| Gun type | FEG |
| Beam current | |
| Specified point resolution | |
| Detectors | |
| EDS | |
| Add-ons |