The LEO Gemini 1530 is a dedicated imaging microscope allowing a high sample throughput with a yet excellent image quality. It´s low-kV capability allows to inspect non-conductive samples without the need for a conductive coating prior to the examination. Furthermore, the in-lens SE detector yields good image contrast at simultaneously extremely low beam currents.
|Acceleration voltage||0.1 … 30 kV|
|Gun type||Schottky FEG|
|Specified point resolution||1.0 nm (@ 30 kV and WD = 4 mm)|
|Detectors||InLens (SE), Everhart-Thornley|
|energy dispersive X-ray spectrometer||none|
|Sample holder||8x-holder, cross section holder|