Foto: MPI-P
The LEO Gemini 1530 is a dedicated imaging microscope allowing a high sample throughput with a yet excellent image quality. It´s low-kV capability allows to inspect non-conductive samples without the need for a conductive coating prior to the examination. Furthermore, the in-lens SE detector yields good image contrast at simultaneously extremely low beam currents.
| Acceleration voltage | 0.1 … 30 kV |
| Gun type | Schottky FEG |
| Specified point resolution | 1.0 nm (@ 30 kV and WD = 4 mm) |
| Detectors | InLens (SE), Everhart-Thornley |
| energy dispersive X-ray spectrometer | none |
| Add-ons | |
| Sample holder | 8x-holder, cross section holder |