LEO Gemini 1530


Foto: MPI-P

The LEO Gemini 1530 is a dedicated imaging microscope allowing a high sample throughput with a yet excellent image quality. It´s low-kV capability allows to inspect non-conductive samples without the need for a conductive coating prior to the examination. Furthermore, the in-lens SE detector yields good image contrast at simultaneously extremely low beam currents.


Acceleration voltage0.1 … 30 kV
Gun typeSchottky FEG
Specified point resolution1.0 nm (@ 30 kV and WD = 4 mm)
DetectorsInLens (SE), Everhart-Thornley
energy dispersive X-ray spectrometernone
Sample holder8x-holder, cross section holder