Foto: JGU
The FEI Nova NanoSEM is equipped with a field emission emitter and suitable for high resolutions. Various detectors allow a wide range for imaging. It is equipped with an energy dispersive X-ray spectrometer. There is also a cryogenic system with freeze-fracture unit.
| Acceleration voltage | 0.5 - 30 kV |
| Gun type | Schottky FEG |
| Beam current | 0.3 - 22 pA |
| Specified point resolution | 1.8 nm bei 1 kV (SE) 1.0 nm bei 15 kV (SE) |
| Detectors | Everhart-Thornley (ETD), Through lens (TLD), Low-kV high-contrast (vCD), back scattered electrons (BSED) |
| Scanning unit (STEM) | |
| Camera | Infrared |
| Energy dispersive X-ray spectrometer | EDAX-Pegasus X4M |
| Add-ons | Cryo-preparation with Cryo-desk |