Foto: MPI-P
The Hitachi SU8000 is a versatile SEM offering a wide range of imaging and detection capabilities. For a stable operation and an excellent resolution it is operated with a cold field emitter gun. In addition to the good electron optical properties it comes with different detection systems in order to exploit a wide range of contrast formation mechanisms. Due to it´s low-kV mode it is possible to inspect non-conducting samples without the need for applying a conductive coating prior to inspection.
For chemical analysis the SU8000 is equipped with an energy dispersive x-ray spectrometer (EDS or EDX) utilizing local chemical analysis of the sample.
For wet samples and for samples that undergo morphological changes during drying the SU8000 is equipped with a cryo-preparation and –transfer system as well.
| Acceleration voltage | 0.5 ... 30 kV 0.1 ... 2.0 kV in DM |
| Gun type | Cold FEG |
| Specified point resolution | 1.0 nm (@ 15 kV und WD = 4mm) 1.3 nm (@ 1kV Spannung, WD = 1.5 mm) |
| Detectors | In-lens(top, bottom), Everhart-Thormley, Transmission |
| Energy filter | ExB |
| Energy dispersive X-ray spectrometer | Bruker Quantax |
| Add-ons | Cryo-preparation with Cryo-Desk |
| Sample holder | 8x, STEM Dark- and Bright field, cross section |